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Thermal Evaporation/RF Magnetron Sputtering Deposition System
E-Beam Deposition System
Taconic Ion Implanter
Microlithography
Clean Room
SPS P6700 Series Spin Coater
Karl Suss MJB 3 Mask Aligner
Tegal 703 Plasma Etcher
Veeco Dimension 3100 Atomic Force Microscope
JEOL JSM-6360LV Scanning Electron Microscope
Missouri State University
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CASE
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Facilities
> SPS P6700 Series Spin Coater
SPS P6700 Series Spin Coater
Specifications:
speed: 100-8000 RPM
spin time: up to 999 seconds
vacuum chuck for holding samples
can handle substrate sizes within a radius of 4”
CASE Applications:
spin coating of polymer materials for creating metal/polymer bilayers
spin coating of photoresist for patterning in the photolithography process
Missouri State University
• Copyright 2005 Board of Governors, Missouri State University
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CASE
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• URL: http://jvic.missouristate.edu