JEOL JSM-6360LV Scanning Electron Microscope

The SEM utilizes electrons to create magnified images of a specimen.

Specifications:

• high vacuum (HV) and low vacuum (LV) modes
• LV mode pressure range: (1Pa ~ 270 Pa)
• 3.0nm resolution (WD: 6mm) in HV mode/ 4.0nm resolution in LV mode
• magnification: x 5 ~ x 300,000 (149 steps)
• accelerating voltage: 0.5 kV ~ 30 kV (65 steps)
• total traversal of stage (x: 80mm, y: 40mm)
• z-motion (WD): 5mm ~ 48mm
• stage tilt: -10^o ~ +90^o
• rotation: 360^o continuous
• max specimen size: 150 mm diameter
• Everhart Thornley detector for SEI
• three-segment solid state BEI detector (compo, topo, & shadow)

CASE Applications:

• verify micro-electronic device pattern formation through microlithography process
• tilt option utilized to view height of bridge pillars as well as free suspending bridges
• view near surface regions of conducting polymers which are used to build bridges