Thermal Evaporation/RF Magnetron Sputtering Deposition System

Thermal deposition is a thin film growth method, which can be utilized in the micro-fabrication process of the multi-stage development of both Bio MEMS and IR focal plane arrays.            

Specifications:

• thermal source evaporation
• RF magnetron sputtering
• multi-layer deposition (up to 3 different layers)
• co-evaporation (up to 2 different materials)
• thin film synthesis of metals, dielectrics, and organic polymers
• amount of samples made for a single thermal deposition run: maximum of either two 3” wafers or six 3” x 1” glass slides
• amount of samples  made for a single RF sputtering run: maximum of either one 3” wafer or three 3” x 1” glass slides

CASE Applications:

• thin film contacts deposition for Bio MEMS and IR detectors
• growth of metal/polymer bilayers